Gas management system

A gas recycle system includes a gas purifier system; a gas analysis system; a gas blending system that prepares a recycled gas mixture; and a control system configured to: determine whether a measured amount of at least one intended gas component is within a first range of acceptable values; and det...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Gillespie, Walter Dale, Kanawade, Dinesh Adinath, Roman Gutierrez, Yzzer, Luo, Edward Siqi
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:A gas recycle system includes a gas purifier system; a gas analysis system; a gas blending system that prepares a recycled gas mixture; and a control system configured to: determine whether a measured amount of at least one intended gas component is within a first range of acceptable values; and determine whether a measured amount of the at least one impurity gas component is within a second range of acceptable values. If the measured amount of the at least one intended gas component is not within the first range of acceptable values, the control system causes the gas blending system to add an additional gas component to the purified gas mixture to prepare the recycled gas mixture; and if the measured amount of the at least one impurity gas is not within the second range of acceptable values, the control system generates an error signal.