Flow rate controller and drive device
A flow rate controller and a drive device are provided with a first flow passage connected between an operation switching valve and an air cylinder, and that supplies air to and discharges air from a cylinder chamber of the air cylinder; a first flow rate adjustment part provided in the first flow p...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | A flow rate controller and a drive device are provided with a first flow passage connected between an operation switching valve and an air cylinder, and that supplies air to and discharges air from a cylinder chamber of the air cylinder; a first flow rate adjustment part provided in the first flow passage; a second flow passage adjacent to the first flow passage; a pilot check valve provided at a point along the second flow passage; a second flow rate adjustment part connected in series to the pilot check valve at a point along the second flow passage; a pilot air flow passage, one end of which communicates with the operation switching valve and the other end of which is connected to a pilot port of the pilot check valve; and a third flow rate adjustment part provided in the pilot air flow passage. |
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