Surface inspection apparatus, non-transitory computer readable medium storing program, and surface inspection method

Surface inspection apparatus, non-transitory computer readable medium storing program, and surface inspection method

A surface inspection apparatus includes an imaging device configured to image a surface of an object to be inspected, and a processor configured to: calculate a numerical value representing a quality of the surface by processing an image captured by the imaging device, and receive a change in a rang...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Aikawa, Kiyofumi, Ichikawa, Hirokazu, Hiramatsu, Takashi, Uno, Miho, Tasaki, Kaito, Kuwada, Yoshitaka
Format: Patent
Sprache:eng
Schlagworte:
CALCULATING
COMPUTING
COUNTING
IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
PHYSICS
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Beschreibung
Zusammenfassung:A surface inspection apparatus includes an imaging device configured to image a surface of an object to be inspected, and a processor configured to: calculate a numerical value representing a quality of the surface by processing an image captured by the imaging device, and receive a change in a range used to calculate the numerical value indicated by an index in the image.