Mass flow controller based fast gas exchange
Embodiments of fast gas exchange (FGE) manifolds are provided herein. In some embodiments, a FGE manifold includes: a manifold housing having a plurality of inlets and a plurality of outlets for flowing a plurality of process gases therethrough, wherein the plurality of outlets correspond with a plu...
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| creator | Patil, Ravikumar Kuberan, Prabhuraj Chandrabalu, Saravanan Chowdhury, Abhishek Chakravarthy, Arun Chakravarthy Farr, Jon Christian |
| description | Embodiments of fast gas exchange (FGE) manifolds are provided herein. In some embodiments, a FGE manifold includes: a manifold housing having a plurality of inlets and a plurality of outlets for flowing a plurality of process gases therethrough, wherein the plurality of outlets correspond with a plurality of zones in the process chamber; a plurality of hybrid valves disposed in the manifold housing and fluidly coupled to the plurality of inlets; a plurality of mass flow controllers disposed in the manifold housing downstream of the plurality of hybrid valves; a plurality of mixing lines extending downstream from the plurality of mass flow controllers to a plurality of outlet lines; and a plurality of outlet valves disposed in line with corresponding ones of the plurality of outlet lines, wherein a flow path is defined between each inlet of the plurality of inlets and each outlet of the plurality of outlets. |
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In some embodiments, a FGE manifold includes: a manifold housing having a plurality of inlets and a plurality of outlets for flowing a plurality of process gases therethrough, wherein the plurality of outlets correspond with a plurality of zones in the process chamber; a plurality of hybrid valves disposed in the manifold housing and fluidly coupled to the plurality of inlets; a plurality of mass flow controllers disposed in the manifold housing downstream of the plurality of hybrid valves; a plurality of mixing lines extending downstream from the plurality of mass flow controllers to a plurality of outlet lines; and a plurality of outlet valves disposed in line with corresponding ones of the plurality of outlet lines, wherein a flow path is defined between each inlet of the plurality of inlets and each outlet of the plurality of outlets.</description><language>eng</language><subject>BLASTING ; CONTROLLING ; HEATING ; LIGHTING ; MECHANICAL ENGINEERING ; MIXING, e.g. DISSOLVING, EMULSIFYING, DISPERSING ; PERFORMING OPERATIONS ; PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL ; PHYSICS ; PIPE-LINE SYSTEMS ; PIPE-LINES ; REGULATING ; STORING OF DISTRIBUTING GASES OR LIQUIDS ; SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES ; TRANSPORTING ; WEAPONS</subject><creationdate>2024</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20240326&DB=EPODOC&CC=US&NR=11940819B1$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25543,76293</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20240326&DB=EPODOC&CC=US&NR=11940819B1$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>Patil, Ravikumar</creatorcontrib><creatorcontrib>Kuberan, Prabhuraj</creatorcontrib><creatorcontrib>Chandrabalu, Saravanan</creatorcontrib><creatorcontrib>Chowdhury, Abhishek</creatorcontrib><creatorcontrib>Chakravarthy, Arun Chakravarthy</creatorcontrib><creatorcontrib>Farr, Jon Christian</creatorcontrib><title>Mass flow controller based fast gas exchange</title><description>Embodiments of fast gas exchange (FGE) manifolds are provided herein. In some embodiments, a FGE manifold includes: a manifold housing having a plurality of inlets and a plurality of outlets for flowing a plurality of process gases therethrough, wherein the plurality of outlets correspond with a plurality of zones in the process chamber; a plurality of hybrid valves disposed in the manifold housing and fluidly coupled to the plurality of inlets; a plurality of mass flow controllers disposed in the manifold housing downstream of the plurality of hybrid valves; a plurality of mixing lines extending downstream from the plurality of mass flow controllers to a plurality of outlet lines; and a plurality of outlet valves disposed in line with corresponding ones of the plurality of outlet lines, wherein a flow path is defined between each inlet of the plurality of inlets and each outlet of the plurality of outlets.</description><subject>BLASTING</subject><subject>CONTROLLING</subject><subject>HEATING</subject><subject>LIGHTING</subject><subject>MECHANICAL ENGINEERING</subject><subject>MIXING, e.g. DISSOLVING, EMULSIFYING, DISPERSING</subject><subject>PERFORMING OPERATIONS</subject><subject>PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL</subject><subject>PHYSICS</subject><subject>PIPE-LINE SYSTEMS</subject><subject>PIPE-LINES</subject><subject>REGULATING</subject><subject>STORING OF DISTRIBUTING GASES OR LIQUIDS</subject><subject>SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES</subject><subject>TRANSPORTING</subject><subject>WEAPONS</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2024</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZNDxTSwuVkjLyS9XSM7PKynKz8lJLVJISixOTVFISywuUUhPLFZIrUjOSMxLT-VhYE1LzClO5YXS3AyKbq4hzh66qQX58anFBYnJqXmpJfGhwYaGliYGFoaWTobGxKgBAIKKKcI</recordid><startdate>20240326</startdate><enddate>20240326</enddate><creator>Patil, Ravikumar</creator><creator>Kuberan, Prabhuraj</creator><creator>Chandrabalu, Saravanan</creator><creator>Chowdhury, Abhishek</creator><creator>Chakravarthy, Arun Chakravarthy</creator><creator>Farr, Jon Christian</creator><scope>EVB</scope></search><sort><creationdate>20240326</creationdate><title>Mass flow controller based fast gas exchange</title><author>Patil, Ravikumar ; Kuberan, Prabhuraj ; Chandrabalu, Saravanan ; Chowdhury, Abhishek ; Chakravarthy, Arun Chakravarthy ; Farr, Jon Christian</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_US11940819B13</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>2024</creationdate><topic>BLASTING</topic><topic>CONTROLLING</topic><topic>HEATING</topic><topic>LIGHTING</topic><topic>MECHANICAL ENGINEERING</topic><topic>MIXING, e.g. DISSOLVING, EMULSIFYING, DISPERSING</topic><topic>PERFORMING OPERATIONS</topic><topic>PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL</topic><topic>PHYSICS</topic><topic>PIPE-LINE SYSTEMS</topic><topic>PIPE-LINES</topic><topic>REGULATING</topic><topic>STORING OF DISTRIBUTING GASES OR LIQUIDS</topic><topic>SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES</topic><topic>TRANSPORTING</topic><topic>WEAPONS</topic><toplevel>online_resources</toplevel><creatorcontrib>Patil, Ravikumar</creatorcontrib><creatorcontrib>Kuberan, Prabhuraj</creatorcontrib><creatorcontrib>Chandrabalu, Saravanan</creatorcontrib><creatorcontrib>Chowdhury, Abhishek</creatorcontrib><creatorcontrib>Chakravarthy, Arun Chakravarthy</creatorcontrib><creatorcontrib>Farr, Jon Christian</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Patil, Ravikumar</au><au>Kuberan, Prabhuraj</au><au>Chandrabalu, Saravanan</au><au>Chowdhury, Abhishek</au><au>Chakravarthy, Arun Chakravarthy</au><au>Farr, Jon Christian</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Mass flow controller based fast gas exchange</title><date>2024-03-26</date><risdate>2024</risdate><abstract>Embodiments of fast gas exchange (FGE) manifolds are provided herein. In some embodiments, a FGE manifold includes: a manifold housing having a plurality of inlets and a plurality of outlets for flowing a plurality of process gases therethrough, wherein the plurality of outlets correspond with a plurality of zones in the process chamber; a plurality of hybrid valves disposed in the manifold housing and fluidly coupled to the plurality of inlets; a plurality of mass flow controllers disposed in the manifold housing downstream of the plurality of hybrid valves; a plurality of mixing lines extending downstream from the plurality of mass flow controllers to a plurality of outlet lines; and a plurality of outlet valves disposed in line with corresponding ones of the plurality of outlet lines, wherein a flow path is defined between each inlet of the plurality of inlets and each outlet of the plurality of outlets.</abstract><oa>free_for_read</oa></addata></record> |
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| subjects | BLASTING CONTROLLING HEATING LIGHTING MECHANICAL ENGINEERING MIXING, e.g. DISSOLVING, EMULSIFYING, DISPERSING PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL PHYSICS PIPE-LINE SYSTEMS PIPE-LINES REGULATING STORING OF DISTRIBUTING GASES OR LIQUIDS SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES TRANSPORTING WEAPONS |
| title | Mass flow controller based fast gas exchange |
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