Mass flow controller based fast gas exchange

Embodiments of fast gas exchange (FGE) manifolds are provided herein. In some embodiments, a FGE manifold includes: a manifold housing having a plurality of inlets and a plurality of outlets for flowing a plurality of process gases therethrough, wherein the plurality of outlets correspond with a plu...

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Bibliographische Detailangaben
Hauptverfasser:	Patil, Ravikumar, Kuberan, Prabhuraj, Chandrabalu, Saravanan, Chowdhury, Abhishek, Chakravarthy, Arun Chakravarthy, Farr, Jon Christian
Format:	Patent
Sprache:	eng
Schlagworte:	BLASTING CONTROLLING HEATING LIGHTING MECHANICAL ENGINEERING MIXING, e.g. DISSOLVING, EMULSIFYING, DISPERSING PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL PHYSICS PIPE-LINE SYSTEMS PIPE-LINES REGULATING STORING OF DISTRIBUTING GASES OR LIQUIDS SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES TRANSPORTING WEAPONS
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Beschreibung
Zusammenfassung:	Embodiments of fast gas exchange (FGE) manifolds are provided herein. In some embodiments, a FGE manifold includes: a manifold housing having a plurality of inlets and a plurality of outlets for flowing a plurality of process gases therethrough, wherein the plurality of outlets correspond with a plurality of zones in the process chamber; a plurality of hybrid valves disposed in the manifold housing and fluidly coupled to the plurality of inlets; a plurality of mass flow controllers disposed in the manifold housing downstream of the plurality of hybrid valves; a plurality of mixing lines extending downstream from the plurality of mass flow controllers to a plurality of outlet lines; and a plurality of outlet valves disposed in line with corresponding ones of the plurality of outlet lines, wherein a flow path is defined between each inlet of the plurality of inlets and each outlet of the plurality of outlets.