Pressure sensor

A pressure sensor has a stem in which a pressure introduction hole into which a pressure medium is introduced and a diaphragm deformable according to the pressure of the pressure medium are formed, and a strain detecting element which is arranged on the diaphragm via an insulating film and being con...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	Miyashita, Kaori, Takeuchi, Hisayuki, Takeda, Eiji, Yamada, Nobuaki, Yokoyama, Kenichi, Kamada, Yukihiro, Takahashi, Masao, Toyoda, Inao, Niimi, Naohisa, Kodama, Hiroshi, Yanagisawa, Yasushi, Yoshida, Naoki, Kamanaru, Shirou, Asano, Kouji, Midorikawa, Yusuke, Tomomatsu, Yoshihiro, Ura, Yasutake
Format:	Patent
Sprache:	eng
Schlagworte:	MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE PHYSICS TESTING
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Beschreibung
Zusammenfassung:	A pressure sensor has a stem in which a pressure introduction hole into which a pressure medium is introduced and a diaphragm deformable according to the pressure of the pressure medium are formed, and a strain detecting element which is arranged on the diaphragm via an insulating film and being configured to output a detection signal according to the deformation of the diaphragm. The strain detecting element is configured to have a portion made of polysilicon. A low doping layer having a higher electrical resistivity than polysilicon and a higher crystallinity than the insulating film is arranged between the insulating film and the strain detecting element.