Contact structure, method, layout, and system

An IC structure includes a fin structure, a contact overlying the fin structure along a first direction, and an isolation layer between the contact and the fin structure. The isolation layer is adjacent to a portion of the contact along a second direction perpendicular to the first direction.

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Bibliographische Detailangaben
Hauptverfasser: Sio, Kam-Tou, Yuan, Lipen, Lai, Chih-Ming, Tzeng, Jiann-Tyng, Lin, Wei-Cheng, Chuang, Cheng-Chi
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:An IC structure includes a fin structure, a contact overlying the fin structure along a first direction, and an isolation layer between the contact and the fin structure. The isolation layer is adjacent to a portion of the contact along a second direction perpendicular to the first direction.