Cantilever, ultrasound acoustic microscopy device comprising the cantilever, method of using the same and lithographic system including the same

A cantilever (30) for an ultrasound acoustic microscopy device is provided comprising a transmission tip (31) to contact a sample (11) to therewith transmit an ultrasound acoustic signal as an ultrasound acoustic wave into the sample. The cantilever further comprises a reception tip (32) separate fr...

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Hauptverfasser: Quesson, Benoit Andre Jacques, Mohtashami, Abbas, Van Neer, Paul Louis Maria Joseph, Van Es, Maarten Hubertus
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creator Quesson, Benoit Andre Jacques
Mohtashami, Abbas
Van Neer, Paul Louis Maria Joseph
Van Es, Maarten Hubertus
description A cantilever (30) for an ultrasound acoustic microscopy device is provided comprising a transmission tip (31) to contact a sample (11) to therewith transmit an ultrasound acoustic signal as an ultrasound acoustic wave into the sample. The cantilever further comprises a reception tip (32) separate from the transmission tip (31) to contact the sample to receive an acoustic signal resulting from reflections of the ultrasound wave from within the sample.
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subjects APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM]
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
SCANNING-PROBE TECHNIQUES OR APPARATUS
TESTING
title Cantilever, ultrasound acoustic microscopy device comprising the cantilever, method of using the same and lithographic system including the same
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