Cantilever, ultrasound acoustic microscopy device comprising the cantilever, method of using the same and lithographic system including the same

Cantilever, ultrasound acoustic microscopy device comprising the cantilever, method of using the same and lithographic system including the same

A cantilever (30) for an ultrasound acoustic microscopy device is provided comprising a transmission tip (31) to contact a sample (11) to therewith transmit an ultrasound acoustic signal as an ultrasound acoustic wave into the sample. The cantilever further comprises a reception tip (32) separate fr...

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Bibliographische Detailangaben
Hauptverfasser: Quesson, Benoit Andre Jacques, Mohtashami, Abbas, Van Neer, Paul Louis Maria Joseph, Van Es, Maarten Hubertus
Format: Patent
Sprache:eng
Schlagworte:
APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM]
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
SCANNING-PROBE TECHNIQUES OR APPARATUS
TESTING
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Beschreibung
Zusammenfassung:A cantilever (30) for an ultrasound acoustic microscopy device is provided comprising a transmission tip (31) to contact a sample (11) to therewith transmit an ultrasound acoustic signal as an ultrasound acoustic wave into the sample. The cantilever further comprises a reception tip (32) separate from the transmission tip (31) to contact the sample to receive an acoustic signal resulting from reflections of the ultrasound wave from within the sample.