Embedded backside memory on a field effect transistor

In some embodiments, the present disclosure relates to an integrated chip that includes a first and second transistors arranged over a substrate. The first transistor includes first channel structures extending between first and second source/drain regions. A first gate electrode is arranged between...

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Bibliographische Detailangaben
Hauptverfasser: Tsai, Chia-Shiung, Cheng, Chung-Liang, Chao, Huang-Lin, Liu, Kuan-Liang, Lin, Pinyen, Chen, Sheng-Chau, Lin, Yeong-Jyh
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:In some embodiments, the present disclosure relates to an integrated chip that includes a first and second transistors arranged over a substrate. The first transistor includes first channel structures extending between first and second source/drain regions. A first gate electrode is arranged between the first channel structures, and a first protection layer is arranged over a topmost one of the first channel structures. The second transistor includes second channel structures extending between the second source/drain region and a third source/drain region. A second gate electrode is arranged between the second channel structures, and a second protection layer is arranged over a topmost one of the second channel structures. The integrated chip further includes a first interconnect structure arranged between the substrate and the first and second channel structures, and a contact plug structure coupled to the second source/drain region and arranged above the first and second gate electrodes.