Transfer substrate recycling apparatus and transfer substrate recycling method

A transfer substrate recycling apparatus is a transfer substrate recycling apparatus including: a first pass line in which an elongated belt-shaped transfer substrate is unwound and conveyed; a second pass line in which an elongated belt-shaped self-adhesive film is unwound and conveyed; a controlli...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Takakuwa, Yoshio, Ishizu, Seiji
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A transfer substrate recycling apparatus is a transfer substrate recycling apparatus including: a first pass line in which an elongated belt-shaped transfer substrate is unwound and conveyed; a second pass line in which an elongated belt-shaped self-adhesive film is unwound and conveyed; a controlling portion configured to control the conveyance of the transfer substrate; a first removal portion provided in the first pass line, the first removal portion being configured to remove an impurity on the transfer substrate by transferring the impurity onto the self-adhesive film; an inspection portion provided on a downstream side from the first removal portion in the first pass line, the inspection portion being configured to inspect a surface of the transfer substrate; and a second removal portion provided in the first pass line, the second removal portion being configured to remove a residual impurity detected by the inspection portion.