Semiconductor device and manufacturing method thereof

A semiconductor device structure and a method for manufacturing a semiconductor device. As a non-limiting example, various aspects of this disclosure provide a method for manufacturing a semiconductor device that comprises ordering and performing processing steps in a manner that prevents warpage de...

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Bibliographische Detailangaben
Hauptverfasser: Kim, Dong Jin, Rinne, Glenn, Ko, Yeong Beom, Kim, Do Hyung, Kim, Jin Han
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A semiconductor device structure and a method for manufacturing a semiconductor device. As a non-limiting example, various aspects of this disclosure provide a method for manufacturing a semiconductor device that comprises ordering and performing processing steps in a manner that prevents warpage deformation from occurring to a wafer and/or die due to mismatching thermal coefficients.