Oscillation device with a vibrating table that houses an oscillated object

An oscillating device including a vibrating table, an actuator configured to oscillate the vibrating table in a first direction, a coupling mechanism configured to couple the vibrating table with the actuator in such a manner that the vibrating table is movable relative to the actuator in a second d...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Matsumoto, Sigeru, Murauchi, Kazuhiro, Miyashita, Hiroshi
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:An oscillating device including a vibrating table, an actuator configured to oscillate the vibrating table in a first direction, a coupling mechanism configured to couple the vibrating table with the actuator in such a manner that the vibrating table is movable relative to the actuator in a second direction orthogonal to the first direction, and a counter balancer attached to the vibrating table and configured to compensate an imbalance of an oscillated portion including at least the vibrating table, the imbalance being caused by attaching the coupling mechanism to the vibrating table.