Contact resistance monitoring device, manufacturing method thereof, and display panel

A contact resistance monitoring device, a manufacturing method thereof, and a display panel are provided. The contact resistance monitoring device includes a substrate, a gate metal layer disposed on the substrate, an interlayer dielectric layer disposed on the substrate, a source and drain metal la...

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Bibliographische Detailangaben
1. Verfasser:	Nie, Xiaohui
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES PHYSICS SEMICONDUCTOR DEVICES TESTING
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Beschreibung
Zusammenfassung:	A contact resistance monitoring device, a manufacturing method thereof, and a display panel are provided. The contact resistance monitoring device includes a substrate, a gate metal layer disposed on the substrate, an interlayer dielectric layer disposed on the substrate, a source and drain metal layers disposed in the recessed hole of the interlayer dielectric layer, and a pixel electrode layer disposed on the interlayer dielectric layer and the source and drain metal layer.