Method for forming a film or a curable composition, apparatus, and storage medium

A simulation method predicts a behavior of a curable composition in a process of bringing droplets of the curable composition arranged on first and second members into contact with each other, and forming a film of the curable composition on the first member. The method includes inputting a physical...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	Oguchi, Yuichiro, Narioka, Shintaro
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CALCULATING CINEMATOGRAPHY COMPUTING COUNTING ELECTRIC DIGITAL DATA PROCESSING ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
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Beschreibung
Zusammenfassung:	A simulation method predicts a behavior of a curable composition in a process of bringing droplets of the curable composition arranged on first and second members into contact with each other, and forming a film of the curable composition on the first member. The method includes inputting a physical property value of a gas between the first and second members, inputting a movement profile of the second member with respect to the first member when bringing the droplets of the curable composition on the first and second members into contact with each other, obtaining a pressure of the gas between the first and second members based on the physical property value and the input movement profile, and predicting, based on the pressure, an amount of a residual gas confined among the droplets by the contact between the droplets and the second member.