Cleaning agent composition and cleaning method

A cleaning agent composition for use in removal of a polysiloxane adhesive remaining on a substrate, the composition containing a tetrahydrocarbylammonium fluoride and an organic solvent, wherein the organic solvent contains an alkylene glycol dialkyl ether and a lactam compound represented by formu...

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Bibliographische Detailangaben
Hauptverfasser: Karasawa, Ryo, Okuno, Takahisa, Shinjo, Tetsuya, Ogino, Hiroshi
Format: Patent
Sprache:eng
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Zusammenfassung:A cleaning agent composition for use in removal of a polysiloxane adhesive remaining on a substrate, the composition containing a tetrahydrocarbylammonium fluoride and an organic solvent, wherein the organic solvent contains an alkylene glycol dialkyl ether and a lactam compound represented by formula (1).(in formula (1), R101 represents a C1 to C6 alkyl group, and R102 represents a C1 to C6 alkylene group.)