Micromechanical structure and micromechanical sensor

A micromechanical structure including a substrate, a moveable seismic mass, a detection structure, and a main spring. The seismic mass is connected to the substrate using the main spring. A first direction and a second direction perpendicular thereto define a main extension plane of the substrate. T...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Nagel, Cristian, Classen, Johannes, Tebje, Lars, Scheben, Rolf, Eid, Rudy
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:A micromechanical structure including a substrate, a moveable seismic mass, a detection structure, and a main spring. The seismic mass is connected to the substrate using the main spring. A first direction and a second direction perpendicular thereto define a main extension plane of the substrate. The detection structure detects a deflection of the seismic mass and includes first electrodes mounted at the seismic mass and second electrodes mounted at the substrate. The first electrodes and second electrodes have a two-dimensional extension in the first and second directions. The micromechanical structure has a graduated stop structure including a first spring stop, a second spring stop, and a fixed stop.