Electrostatic chuck and substrate fixing device

An electrostatic chuck includes: a ceramic plate; an adsorption electrode that is built in the ceramic plate; and a plurality of connection pads that are built in the ceramic plate to be electrically connected to the adsorption electrode. The connection pads are arranged stepwise.

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Bibliographische Detailangaben
Hauptverfasser:	Shimizu, Kazunori, Koizumi, Naoyuki, Kobayashi, Kentaro
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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Beschreibung
Zusammenfassung:	An electrostatic chuck includes: a ceramic plate; an adsorption electrode that is built in the ceramic plate; and a plurality of connection pads that are built in the ceramic plate to be electrically connected to the adsorption electrode. The connection pads are arranged stepwise.