Light deflector and method for controlling light deflector

A light deflector 130 includes: a control unit 106 configured to generate a resonant drive signal for resonantly driving an MEMS mirror 133, and a non-resonant drive signal for non-resonantly driving the MEMS mirror 133; a resonant sensor 144 configured to detect the resonant drive of the MEMS mirro...

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Bibliographische Detailangaben
1. Verfasser: Nishioka, Ken
Format: Patent
Sprache:eng
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Zusammenfassung:A light deflector 130 includes: a control unit 106 configured to generate a resonant drive signal for resonantly driving an MEMS mirror 133, and a non-resonant drive signal for non-resonantly driving the MEMS mirror 133; a resonant sensor 144 configured to detect the resonant drive of the MEMS mirror 133 and generate a resonant sensor signal; and a sensor signal processing unit 103 configured to acquire a phase difference between the resonant drive signal generated by the control unit 106 and the resonant sensor signal, in a case where the MEMS mirror 133 is resonantly driven in a Y-axis direction, also the MEMS mirror 133 is non-resonantly driven in an X-axis direction, and scanning is performed. The control unit 106 calculates an amplitude of the non-resonant drive of the MEMS mirror 133 on the basis of a change in the above phase difference.