Memory devices having an electrode with tapered sides

The disclosed subject matter relates generally to structures, memory devices and a method of forming the same. More particularly, the present disclosure relates to resistive random-access (ReRAM) memory devices with an electrode having tapered sides. The present disclosure provides a memory device i...

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Bibliographische Detailangaben
Hauptverfasser: Toh, Eng Huat, Tan, Shyue Seng, Loy, Desmond Jia Jun
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:The disclosed subject matter relates generally to structures, memory devices and a method of forming the same. More particularly, the present disclosure relates to resistive random-access (ReRAM) memory devices with an electrode having tapered sides. The present disclosure provides a memory device including a first electrode having a tapered shape and including a tapered side, a top surface, and a bottom surface, in which the bottom surface has a larger surface area than the top surface, a resistive layer on and conforming to at least the tapered side of the first electrode, and a second electrode laterally adjacent to the tapered side of the first electrode, the second electrode including a top surface and a side surface abutting the resistive layer, in which the side surface forms an acute angle with the top surface.