Integrated radiation sensor

An integrated radiation sensor is disclosed. The integrated radiation sensor comprises a first optical filter associated with a first radiation-sensing element and a second optical filter associated with a second radiation-sensing element. The first optical filter is configured to pass radiation to...

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Bibliographische Detailangaben
Hauptverfasser: Eilmsteiner, Gerhard, Siess, Gunter, Buss, Markus, Komma, Julius, Pless, Holger, Jazayerifar, Mahmoud, Bliem, Peter, Lechner, Franz, Roger, Frederic
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:An integrated radiation sensor is disclosed. The integrated radiation sensor comprises a first optical filter associated with a first radiation-sensing element and a second optical filter associated with a second radiation-sensing element. The first optical filter is configured to pass radiation to the first radiation-sensing element with wavelengths within a UV-C range. The second optical filter is configured to pass radiation to the second radiation-sensing element with wavelengths longer than wavelengths within the UV-C range. Also disclosed is a method of manufacturing the integrated radiation sensor and methods of use of the integrated radiation sensor.