Defect inspecting device, defect inspecting method, and storage medium

A defect inspecting device including an acquisition unit, an image generating unit, an inspection unit, and a setting unit. The image generating unit generates one or more feature extraction images by applying to an inspection image a learned classifier. The inspection unit identifies a region corre...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Ikeda, Yasuyuki, Kurita, Masashi
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A defect inspecting device including an acquisition unit, an image generating unit, an inspection unit, and a setting unit. The image generating unit generates one or more feature extraction images by applying to an inspection image a learned classifier. The inspection unit identifies a region corresponding to a defect based on one or more determination parameters and a binarized image generated based on the feature extraction image. The setting unit provisionally sets the determination parameters on premise of a post-adjustment from a user when a number of image data for learning corresponding to the features is less than a threshold value in a case where the region corresponding to the defect is identified based on the pre-learned features, and sets the determination parameters according to designation from the user in a case where the region corresponding to the defect is identified based on a feature other than the pre-learned features.