Multi-shield plate and control system

A multi-shield plate includes a plurality of windows and a plurality of vapor shields mounted to the plurality of windows, wherein each window of the plurality of windows is formed in the plate and extends through an entirety of the plate in a thickness direction. The multi-shield plate further incl...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Lin, Ping-Tse, Lin, Chun-Chih, Lien, Wen-Cheng, Ho, Monica
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A multi-shield plate includes a plurality of windows and a plurality of vapor shields mounted to the plurality of windows, wherein each window of the plurality of windows is formed in the plate and extends through an entirety of the plate in a thickness direction. The multi-shield plate further includes a plurality of apertures in the plate, wherein each of the plurality of apertures extends through the entirety of the plate in the thickness direction and, an aperture of the plurality of apertures is aligned with a corresponding window of the plurality of windows along radius of the multi-shield plate.