Impedance matching in a RF power generation system

An impedance matching network including a mixing module. The mixing module receives a plurality admittances based upon at least one parameter sensed from an output which generated by an RF generator. The output signal is a pulsed RF signal having a plurality of states for each pulse and the pluralit...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Jung, Jaechul, Kim, Kwang Ho, Lee, Hohyoung, Kim, Jongmin, Lee, Changhee
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:An impedance matching network including a mixing module. The mixing module receives a plurality admittances based upon at least one parameter sensed from an output which generated by an RF generator. The output signal is a pulsed RF signal having a plurality of states for each pulse and the plurality of admittances correspond to the plurality states. The mixing module generates a virtual admittance determined in accordance with the plurality of admittances adjusted by a gain. The impedance matching module receives the virtual admittance and generates a command to adjust a capacitance of the impedance matching network or a command to adjust a frequency of the output signal in accordance with the virtual admittance.