Method for producing lens elements and packaged radiation-sensitive devices on wafer level

A production method includes fixing ball elements of a semiconductor material to a carrier substrate by means of heat and pressure; and one-sided thinning of the ball elements fixed to the carrier substrate to form plano-convex lens elements of a semiconductor material.

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Hauptverfasser: Laske, Norman, Kulkarni, Amit, Schulz-Walsemann, Arne Veit, Quenzer, Hans-Joachim, Stenchly, Vanessa
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creator Laske, Norman
Kulkarni, Amit
Schulz-Walsemann, Arne Veit
Quenzer, Hans-Joachim
Stenchly, Vanessa
description A production method includes fixing ball elements of a semiconductor material to a carrier substrate by means of heat and pressure; and one-sided thinning of the ball elements fixed to the carrier substrate to form plano-convex lens elements of a semiconductor material.
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PERFORMING OPERATIONS
PHYSICS
PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCESIN A PLASTIC STATE
SEMICONDUCTOR DEVICES
TRANSPORTING
WORKING OF PLASTICS
WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
title Method for producing lens elements and packaged radiation-sensitive devices on wafer level
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