Method for producing lens elements and packaged radiation-sensitive devices on wafer level

A production method includes fixing ball elements of a semiconductor material to a carrier substrate by means of heat and pressure; and one-sided thinning of the ball elements fixed to the carrier substrate to form plano-convex lens elements of a semiconductor material.

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Bibliographische Detailangaben
Hauptverfasser: Laske, Norman, Kulkarni, Amit, Schulz-Walsemann, Arne Veit, Quenzer, Hans-Joachim, Stenchly, Vanessa
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:A production method includes fixing ball elements of a semiconductor material to a carrier substrate by means of heat and pressure; and one-sided thinning of the ball elements fixed to the carrier substrate to form plano-convex lens elements of a semiconductor material.