Bio-field effect transistor device

A bioFET device includes a semiconductor substrate having a first surface and an opposite, parallel second surface and a plurality of bioFET sensors on the semiconductor substrate. Each of the bioFET sensors includes a gate formed on the first surface of the semiconductor substrate and a channel reg...

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Bibliographische Detailangaben
Hauptverfasser:	Huang, Jui-Cheng, Huang, Yu-Jie, Huang, Shih-Fen, Chang, Hector, Cheng, Chun-Ren, Wen, Chin-Hua, Chen, Tung-Tsun, Chang, Yi-Hsien, Cheng, Sean, Lin, Ching-Hui
Format:	Patent
Sprache:	eng
Schlagworte:	BEER BIOCHEMISTRY CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE CHEMISTRY COMPOSITIONS OR TEST PAPERS THEREFOR CONDITION-RESPONSIVE CONTROL IN MICROBIOLOGICAL ORENZYMOLOGICAL PROCESSES ELECTRICITY ENZYMOLOGY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING MEASURING OR TESTING PROCESSES INVOLVING ENZYMES, NUCLEICACIDS OR MICROORGANISMS METALLURGY MICROBIOLOGY MIXING, e.g. DISSOLVING, EMULSIFYING, DISPERSING MUTATION OR GENETIC ENGINEERING PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL PHYSICS PROCESSES OF PREPARING SUCH COMPOSITIONS SPIRITS TESTING TRANSPORTING VINEGAR WINE
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Beschreibung
Zusammenfassung:	A bioFET device includes a semiconductor substrate having a first surface and an opposite, parallel second surface and a plurality of bioFET sensors on the semiconductor substrate. Each of the bioFET sensors includes a gate formed on the first surface of the semiconductor substrate and a channel region formed within the semiconductor substrate beneath the gate and between source/drain (S/D) regions in the semiconductor substrate. The channel region includes a portion of the second surface of the semiconductor substrate. An isolation layer is disposed on the second surface of the semiconductor substrate. The isolation layer has an opening positioned over the channel region of more than one bioFET sensor of the plurality of bioFET sensors. An interface layer is disposed on the channel region of the more than one bioFET sensor in the opening.