Pressure sensing device with cavity and related methods

A pressure sensing device may include a body configured to distribute a load applied between first and second parts positioned one against the other, and a pressure sensor carried by the body. The pressure sensor may include a support body, and an IC die mounted with the support body and defining a...

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Bibliographische Detailangaben
Hauptverfasser: Ziglioli, Federico Giovanni, Murari, Bruno, Pagani, Alberto
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A pressure sensing device may include a body configured to distribute a load applied between first and second parts positioned one against the other, and a pressure sensor carried by the body. The pressure sensor may include a support body, and an IC die mounted with the support body and defining a cavity. The IC die may include pressure sensing circuitry responsive to bending associated with the cavity, and an IC interface coupled to the pressure sensing circuitry.