MEMS-based airflow system having a vibrating fan element arrangement

A system including an orifice plate, a fan element and at least one channel is disclosed. The orifice plate has at least one orifice therein. The fan element is configured to undergo vibrational motion to drive a fluid through the orifice(s). The fluid is drawn through the channel(s) in response to...

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Bibliographische Detailangaben
Hauptverfasser:	Sathyamurthy, Prabhu, Gally, Brian James, Mukundan, Vikram, Yalamarthy, Ananth Saran, Madhavapeddy, Seshagiri Rao, Ganti, Suryaprakash, Rayapati, Narayana Prasad, Mignard, Marc
Format:	Patent
Sprache:	eng
Schlagworte:	BLASTING HEATING LIGHTING MECHANICAL ENGINEERING POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS PUMPS FOR LIQUIDS OR ELASTIC FLUIDS WEAPONS
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Beschreibung
Zusammenfassung:	A system including an orifice plate, a fan element and at least one channel is disclosed. The orifice plate has at least one orifice therein. The fan element is configured to undergo vibrational motion to drive a fluid through the orifice(s). The fluid is drawn through the channel(s) in response to the fluid being driven through the at least one orifice.