Apparatus and system for a LiDAR antenna

An apparatus including a light detection and ranging (LiDAR) antenna of an optical phased array includes a silicon-on-insulator substrate including a silicon wire waveguide embedded within the substrate and a grating layer disposed over the substrate. The grating layer includes a silicon nitride lay...

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Bibliographische Detailangaben
Hauptverfasser:	Sayyah, Keyvan, Huang, Biqin, Sarkissian, Raymond
Format:	Patent
Sprache:	eng
Schlagworte:	ANALOGOUS ARRANGEMENTS USING OTHER WAVES DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING FREQUENCY-CHANGING LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION ORRERADIATION OF RADIO WAVES MEASURING NON-LINEAR OPTICS OPTICAL ANALOGUE/DIGITAL CONVERTERS OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICAL LOGIC ELEMENTS OPTICS PERFORMING OPERATIONS PHYSICS RADIO DIRECTION-FINDING RADIO NAVIGATION TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF TESTING TRANSPORTING VEHICLES IN GENERAL VEHICLES, VEHICLE FITTINGS, OR VEHICLE PARTS, NOT OTHERWISEPROVIDED FOR
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Beschreibung
Zusammenfassung:	An apparatus including a light detection and ranging (LiDAR) antenna of an optical phased array includes a silicon-on-insulator substrate including a silicon wire waveguide embedded within the substrate and a grating layer disposed over the substrate. The grating layer includes a silicon nitride layer coating the silicon-on-insulator substrate and including a plurality of etchings formed in a direction perpendicular to a longitudinal axis of the optical phased array and a silicon oxynitride layer coating the silicon nitride layer and filling the etchings. The etchings are relatively thin in the direction of the longitudinal axis of the optical phased array at a first end of the optical antenna and are relatively thick in the direction of the longitudinal axis at a second end. The etchings gradually increase in thickness between the first end of the optical phased array and the second end of the optical antenna.