Inspection apparatus including power supply for supplying power to heating mechanism used for heating device

A power supply for supplying a power to a heating mechanism used for heating a measurement target that emits a measurement signal includes an input device configured to output an input signal that reflects a control signal in a differentiable periodic waveform having a frequency of 1 kHz or less. Th...

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Bibliographische Detailangaben
Hauptverfasser: Fujii, Fumiya, Kasai, Shigeru
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A power supply for supplying a power to a heating mechanism used for heating a measurement target that emits a measurement signal includes an input device configured to output an input signal that reflects a control signal in a differentiable periodic waveform having a frequency of 1 kHz or less. The power supply includes a switching amplifier configured to amplify the input signal from the input device and output the amplified signal.