Semiconductor device including bonding pad metal layer structure

A semiconductor device is proposed. The semiconductor device includes a wiring metal layer structure. The semiconductor device further includes a dielectric layer structure arranged directly on the wiring metal layer structure. The semiconductor device further includes a bonding pad metal layer stru...

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Bibliographische Detailangaben
Hauptverfasser: Hirschler, Joachim, Humbel, Oliver, Rupp, Thomas, Schaeffer, Carsten, Brandenburg, Jens, Napetschnig, Evelyn, Erbert, Christoffer, Zischang, Julia
Format: Patent
Sprache:eng
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Zusammenfassung:A semiconductor device is proposed. The semiconductor device includes a wiring metal layer structure. The semiconductor device further includes a dielectric layer structure arranged directly on the wiring metal layer structure. The semiconductor device further includes a bonding pad metal layer structure arranged, at least partly, directly on the dielectric layer structure. A layer thickness of the dielectric layer structure ranges from 1% to 30% of a layer thickness of the wiring metal layer structure. The wiring metal layer structure and the bonding pad metal structure are electrically connected through openings in the dielectric layer structure.