Synthetic quartz glass cavity member, synthetic quartz glass cavity lid, optical device package, and making methods

A synthetic quartz glass cavity member (1) is bonded to a substrate (6) having an optical device (7) mounted thereon such that the device may be accommodated in the cavity member. The cavity member (1) has an inside surface consisting of a top surface (2a) opposed to the device (7) and a side surfac...

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Bibliographische Detailangaben
Hauptverfasser: Harada, Daijitsu, Matsui, Harunobu, Takeuchi, Masaki, Okafuji, Daiyu, Yamazaki, Hiroyuki
Format: Patent
Sprache:eng
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Zusammenfassung:A synthetic quartz glass cavity member (1) is bonded to a substrate (6) having an optical device (7) mounted thereon such that the device may be accommodated in the cavity member. The cavity member (1) has an inside surface consisting of a top surface (2a) opposed to the device (7) and a side surface (3a). The top surface (2a) is a mirror surface and the side surface (3a) is a rough surface.