Methods of fabricating ultra-miniature laminated magnetic cores and devices
A method of fabricating a laminated magnetic core including: fabricating a magnetic-core mold on a surface, the magnetic-core mold including a first wall portion having a first sidewall, a second wall portion having a second sidewall, the second sidewall located opposite the first sidewall, the firs...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | A method of fabricating a laminated magnetic core including: fabricating a magnetic-core mold on a surface, the magnetic-core mold including a first wall portion having a first sidewall, a second wall portion having a second sidewall, the second sidewall located opposite the first sidewall, the first and second sidewalls and a portion of the surface defining a mold cavity having a bottom width that is greater than a top width; depositing a seed material on the mold top surface and on a portion of the surface so as to form a conductive layer, wherein the seed material is directed toward the mold top surface and the portion of the surface of the substrate at an angle of incidence that substantially prevents deposition of the seed material on the first and second sidewalls; forming a magnetic layer on the conductive layer; and forming an insulating-sealing layer on the magnetic layer. |
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