Pressure measuring device having a membrane edge and mounting element connected by a diffusion weld

A pressure measuring device includes a ceramic pressure sensor including a ceramic measuring membrane and a sensor mounting configured to secure the pressure sensor such that a membrane region of the measuring membrane surrounded by a membrane edge is contactable with a medium having a pressure to b...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Uehlin, Thomas, Rossberg, Andreas, Wang, Yanli, Schmidt, Elke, Ponath, Nils, Conradt, Jonas, Tham, Anh Tuan
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A pressure measuring device includes a ceramic pressure sensor including a ceramic measuring membrane and a sensor mounting configured to secure the pressure sensor such that a membrane region of the measuring membrane surrounded by a membrane edge is contactable with a medium having a pressure to be measured. The sensor mounting includes a titanium or titanium alloy mounting element including an opening through which the membrane region is contactable with the medium. The membrane edge is connected directly with the mounting element by a diffusion weld produced by a diffusion welding method.