Silicon-containing underlayers

Methods of manufacturing electronic devices employing wet-strippable underlayer compositions comprising a condensate and/or hydrolyzate of a polymer comprising as polymerized units one or more first unsaturated monomers having a condensable silicon-containing moiety, wherein the condensable silicon-...

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Bibliographische Detailangaben
Hauptverfasser: Yamada, Shintaro, Cameron, James F, Greene, Daniel, Coley, Suzanne M, Cui, Li, LaBeaume, Paul J, Cutler, Charlotte A
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:Methods of manufacturing electronic devices employing wet-strippable underlayer compositions comprising a condensate and/or hydrolyzate of a polymer comprising as polymerized units one or more first unsaturated monomers having a condensable silicon-containing moiety, wherein the condensable silicon-containing moiety is pendent to the polymer backbone, and one or more condensable silicon monomers are provided.