Substrate processing system, liquid amount measuring method, computer-readable recording medium, and measuring jig

A substrate processing system includes: a measuring unit provided detachably with respect to a placement portion of a placement stage; a measuring jig for measuring a processing liquid; a liquid processing unit including a supplier which supplies the processing liquid to the measuring jig; a transfe...

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Bibliographische Detailangaben
Hauptverfasser: Ueyama, Shota, Kunugimoto, Yuichiro, Hatakeyama, Shinichi, Teramoto, Akihiro, Nishiyama, Yuta
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A substrate processing system includes: a measuring unit provided detachably with respect to a placement portion of a placement stage; a measuring jig for measuring a processing liquid; a liquid processing unit including a supplier which supplies the processing liquid to the measuring jig; a transfer mechanism for transferring the measuring jig between the measuring unit and the liquid processing unit; and a controller. The controller executes: a process of transferring the measuring jig in the measuring unit from the measuring unit to the liquid processing unit; a process of ejecting the processing liquid from the supplier to the measuring jig; a third process of transferring the measuring jig from the liquid processing unit to the measuring unit; and a fourth process of calculating an ejection amount of the processing liquid based on a measurement value in the measuring unit.