Spin-orbit torque MRAM structure and manufacture thereof

Embodiments of the present disclosure generally include spin-orbit torque magnetoresistive random-access memory (SOT-MRAM) devices and methods of manufacture thereof. The SOT-MRAM devices described herein include an SOT layer laterally aligned with a magnetic tunnel junction (MTJ) stack and formed o...

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Bibliographische Detailangaben
Hauptverfasser: Patel, Sahil, Ahn, Jaesoo, Park, Chando, Kim, Jong Mun, Pakala, Mahendra, Yu, Minrui, Wang, Wenhui, Ngai, Christopher S, Dai, Huixiong, Xue, Lin, Ying, Chentsau Chris
Format: Patent
Sprache:eng
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Zusammenfassung:Embodiments of the present disclosure generally include spin-orbit torque magnetoresistive random-access memory (SOT-MRAM) devices and methods of manufacture thereof. The SOT-MRAM devices described herein include an SOT layer laterally aligned with a magnetic tunnel junction (MTJ) stack and formed over a trench in an interconnect. Thus, the presence of the SOT layer outside the area of the MTJ stack is eliminated, and electric current passes from the interconnect to the SOT layer by SOT-interconnect overlap. The devices and methods described herein reduce the formation of shunting current and enable the MTJ to self-align with the SOT layer in a single etching process.