Laser processing apparatus and laser processing method

A laser processing apparatus includes: a work support portion which supports the work and forms a closed space between the work and the work support portion; pads which are movable upward and downward inside the closed space and include upper surfaces respectively coming into contact with regions ob...

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Bibliographische Detailangaben
Hauptverfasser: Kouketsu, Seiichi, Kobayashi, Takashi, Okubo, Naruhiko, Fukami, Kenichi, Sugai, Kenji
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A laser processing apparatus includes: a work support portion which supports the work and forms a closed space between the work and the work support portion; pads which are movable upward and downward inside the closed space and include upper surfaces respectively coming into contact with regions obtained by dividing a processing object region having the through-holes formed in the work to surround the region of the work over one circle when the pads move upward; a drive unit which drives the pads to move forward and backward between a state in which the pad is in contact with the work and a state in which the pad is separated from the work; a gas supply unit which supplies a gas into the closed space; and clamps which contact the work supported by the work support portion on inner circumferential surfaces and outer circumferential surfaces from above over one circle.