Methods and systems for adsorbing organometallic vapor

Described are methods, devices, and systems useful for adsorbing organometallic vapor onto solid adsorbent material to remove the organometallic vapor from a gas mixture that contains the organometallic vapor and other vapor, particulate materials, or both.

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Hauptverfasser: Vogt, Sarah, Applegarth, Charles H, Holzner, Marco, Browning, Matthew, Cook, Joshua T, Gipson, Rocky D
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creator Vogt, Sarah
Applegarth, Charles H
Holzner, Marco
Browning, Matthew
Cook, Joshua T
Gipson, Rocky D
description Described are methods, devices, and systems useful for adsorbing organometallic vapor onto solid adsorbent material to remove the organometallic vapor from a gas mixture that contains the organometallic vapor and other vapor, particulate materials, or both.
format Patent
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subjects CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOIDCHEMISTRY
PERFORMING OPERATIONS
PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
SEPARATION
THEIR RELEVANT APPARATUS
TRANSPORTING
title Methods and systems for adsorbing organometallic vapor
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