Methods and systems for adsorbing organometallic vapor

Described are methods, devices, and systems useful for adsorbing organometallic vapor onto solid adsorbent material to remove the organometallic vapor from a gas mixture that contains the organometallic vapor and other vapor, particulate materials, or both.

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Bibliographische Detailangaben
Hauptverfasser: Vogt, Sarah, Applegarth, Charles H, Holzner, Marco, Browning, Matthew, Cook, Joshua T, Gipson, Rocky D
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:Described are methods, devices, and systems useful for adsorbing organometallic vapor onto solid adsorbent material to remove the organometallic vapor from a gas mixture that contains the organometallic vapor and other vapor, particulate materials, or both.