Capacitor structure and semiconductor devices having the same

Capacitor structure and semiconductor devices having the same

A capacitor includes a lower electrode including a first metal material and having a first crystal size in a range of a few nanometers, a dielectric layer covering the lower electrode and having a second crystal size that is a value of a crystal expansion ratio times the first crystal size and an up...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Kang, Sang-Yeol, Kim, Eun-Sun, Jung, Kyoo-Ho, Mun, Hyo-Sik, Cho, Kyu-Ho
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
CAPACITORS
CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES ORLIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
ELECTRICITY
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Beschreibung
Zusammenfassung:A capacitor includes a lower electrode including a first metal material and having a first crystal size in a range of a few nanometers, a dielectric layer covering the lower electrode and having a second crystal size that is a value of a crystal expansion ratio times the first crystal size and an upper electrode including a second metal material and covering the dielectric layer. The upper electrode has a third crystal size smaller than the second crystal size.