Method and computing device for manufacturing semiconductor device

A non-transitory computer-readable medium storing codes that, when executed by a processor, cause the processor to perform operations of receiving full chip data including specific patterns of a first layout, extracting a representative pattern of the first layout from the full chip data, generating...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: Chung, Noyoung, Kim, Changsoo, Misaka, Akio
Format: Patent
Sprache:eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:A non-transitory computer-readable medium storing codes that, when executed by a processor, cause the processor to perform operations of receiving full chip data including specific patterns of a first layout, extracting a representative pattern of the first layout from the full chip data, generating a vector of the extracted representative pattern, generating a first data set based on the generated vector, generating a machine learning model by performing machine learning with respect to the first data set, executing an optical proximity correction (OPC) with respect to the specific patterns of the first layout by using the machine learning model, and generating a second layout based on a result of executing the OPC may be provided.