Semiconductor storage device with contact melting prevention
A semiconductor storage device includes a memory cell array including a stacked body having insulating layers and conductive layers that are alternately stacked. The memory cell array includes a cell area and a contact area provided adjacent the cell area. The semiconductor storage device includes:...
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Sprache: | eng |
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Zusammenfassung: | A semiconductor storage device includes a memory cell array including a stacked body having insulating layers and conductive layers that are alternately stacked. The memory cell array includes a cell area and a contact area provided adjacent the cell area. The semiconductor storage device includes: a circuit below the memory cell array; a source layer between the memory cell array and the circuit; a first contact in the contact area, and coupled to the circuit; a second contact over the cell area and the contact area; a first wiring extending in a direction intersecting an extending direction of the second contact in the contact area; a second wiring above the second contact, extending along the second contact in the contact area, and connected to the first wiring; and third contacts between the second wiring and the second contact. |
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