Sensor test apparatus

A sensor test apparatus capable of efficiently testing a sensor is provided.A sensor test apparatus 30 which tests the pressure sensor 90 includes an application unit 40 including an application device 42 including a socket 445 to which the sensor 90 is electronically connected, a pressure chamber 4...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Hayakawa, Atsushi, Nishizaki, Hisao, Takano, Daisuke, Chiba, Michiro, Hanamura, Satoshi, Suga, Kazunari
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A sensor test apparatus capable of efficiently testing a sensor is provided.A sensor test apparatus 30 which tests the pressure sensor 90 includes an application unit 40 including an application device 42 including a socket 445 to which the sensor 90 is electronically connected, a pressure chamber 43 which applies pressure to the sensor 90, and a heat sink 443,462 which applies a thermal stress to the sensor 90, the test unit 35 which tests the sensor 90 via the socket 445, and the conveying robot 33 which conveys the sensor 90 into and out of the application unit 40.