Strain gauge with improved stability

A strain gauge includes a flexible resin substrate; a functional layer formed of a metal, an alloy, or a metal compound, directly on one surface of the substrate; a resistor formed of a film including Cr, CrN, and Cr2N, on one surface of the functional layer; and an insulating resin layer with which...

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Bibliographische Detailangaben
Hauptverfasser: Misaizu, Eiji, Kitamura, Atsushi, Asakawa, Toshiaki, Yuguchi, Akiyo, Adachi, Shigeyuki
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A strain gauge includes a flexible resin substrate; a functional layer formed of a metal, an alloy, or a metal compound, directly on one surface of the substrate; a resistor formed of a film including Cr, CrN, and Cr2N, on one surface of the functional layer; and an insulating resin layer with which the resistor is coated.