Support structure and method of forming a support structure

A structure for fixing a membrane to a carrier including a carrier; a suspended structure; and a holding structure with a rounded concave shape which is configured to fix the suspended structure to the carrier and where a tapered side of the holding structure physically connects to the suspended str...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Krumbein, Ulrich, Dehe, Alfons, Gabl, Reinhard
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:A structure for fixing a membrane to a carrier including a carrier; a suspended structure; and a holding structure with a rounded concave shape which is configured to fix the suspended structure to the carrier and where a tapered side of the holding structure physically connects to the suspended structure is disclosed. A method of forming the holding structure on a carrier to support a suspended structure is further disclosed. The method may include: forming a holding structure on a carrier; forming a suspended structure on the holding structure; shaping the holding structure such that it has a concave shape; and arranging the holding structure such that a tapered side of the holding structure physically connects to the suspended structure.