One-time programmable memory cell and fabrication method thereof

A one-time programmable (OTP) memory cell includes a substrate comprising an active area surrounded by an isolation region, a transistor disposed on the active area, and a diffusion-contact fuse electrically coupled to the transistor. The diffusion-contact fuse includes a diffusion region in the act...

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Bibliographische Detailangaben
Hauptverfasser: Pai, Chi-Horn, Lee, Kuo-Hsing, Wong, Chang-Chien, Hsueh, Sheng-Yuan, Tseng, Ching-Hsiang, Hsu, Shih-Chieh
Format: Patent
Sprache:eng
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Zusammenfassung:A one-time programmable (OTP) memory cell includes a substrate comprising an active area surrounded by an isolation region, a transistor disposed on the active area, and a diffusion-contact fuse electrically coupled to the transistor. The diffusion-contact fuse includes a diffusion region in the active area, a silicide layer on the diffusion region, and a contact partially landed on the silicide layer and partially landed on the isolation region.