Placement system for door of wafer pod

The application discloses a placement system for a door of a wafer pod, including a loadport. A docking interface is formed in the loadport, a placement mechanism is arranged on one side surface of the loadport, and includes a swing component, a follower component, and a docking plate. The swing com...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Wang, Xuchen, Wang, Wenguang, Zhang, Dongfeng, Ye, Ying, Bao, Weicheng
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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