Semiconductor device and method for fabricating the same

A semiconductor device and a fabricating method thereof are provided. The semiconductor device includes a substrate, a first nanowire spaced apart from a first region of the substrate, a first gate electrode surrounding a periphery of the first nanowire, a second nanowire spaced apart from a second...

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Bibliographische Detailangaben
Hauptverfasser: Sohn, Chang Woo, Lee, Dong Hun, Bae, Dong Il, Song, Seung Min, Yang, Jung Gil
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A semiconductor device and a fabricating method thereof are provided. The semiconductor device includes a substrate, a first nanowire spaced apart from a first region of the substrate, a first gate electrode surrounding a periphery of the first nanowire, a second nanowire spaced apart from a second region of the substrate and extending in a first direction and having a first width in a second direction intersecting the first direction, a supporting pattern contacting the second nanowire and positioned under the second nanowire, and a second gate electrode extending in the second direction and surrounding the second nanowire and the supporting pattern.